Asian Journal of Physics Vol. 30 Nos 10 & 11 (2021) 1547-1572

Micro and nano scale optical metrology for shiny surfaces and difficult to access aircraft engine components – A review

Aswin Haridas and Murukeshan Vadakke Matham

Industrial production has always been driven by global competition and the need for efficient market adaptation. A strategic initiative termed Industry 4.0 was recently introduced to cater to these demands, which increased the requirements for both the manufacturing and the metrology sectors. It is predicted that the futuristic aircraft engines would contain large components with microscale features and those having areas that are difficult to access or complex internal channels. While the former requires dedicated measurement systems that challenge the physical limitations of optics, the accessibility of the latter set of components poses additional challenges. This paper provides an overview of the State-of-the-Art literature survey conducted in the related research fields. Various techniques for evaluating surface roughness parameters of rough and shiny surfaces (0.2 μm < Ra < 25 μm) are investigated. The outcome of the literature review is thereafter summarized, which leads to identifying the key research gaps in the domain. © Anita Publications. All rights reserved. © Anita Publications. All rights reserved
Keywords: Surface roughness evaluation, optical imaging, non-destructive optical techniques, Industry 4.0, Factory of the future, Aircraft engine components, Aerospace inspection.

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  1. Changi Group. (2019, January 29). Traffic Statistics. Retrieved from
  2. Boston Consulting Group. Embracing Industry 4.0 and Rediscovering Growth. Describes the 9 pillars of industry 4.0. Retrieved from:
  3. Backman D G, Williams J C, Advanced materials for aircraft engine applications, Science, 255(1992)1082–1087.
  4. Red C, Composites in commercial aircraft engines, 2014-2023. Retrieved from:
  5. Hartl D J, Lagoudas D C, Aerospace applications of shape memory alloys. Proceedings of the Institution of Mechanical Engineers, Part G: J Aerosp Eng, 221(2007)535–552.
  6. Bheekhun N, Talib A, Rahim A, Hassan M R, Aerogels in aerospace: an overview, Adv Mater Sci Eng, (2013) Article ID 406065;
  7. Leach R, Sherlock B, Applications of super-resolution imaging in the field of surface topography measurement. Surf Topogr: Metrol Prop, 2(2013)023001; doi.10.1088/2051-672X/2/2/023001.
  8. Haridas A, Investigation into micro and nano scale optical metrology for shiny surfaces and difficult to access aircraft engine components. Doctoral Thesis, Nanyang Technological University, Singapore, 2019.
  9. Leach R, Chapter 1 – Introduction to Metrology for Advanced Manufacturing and Micro- and Nanotechnology, in Fundamental Principles of Engineering Nanometrology, 2nd Edn, (William Andrew Publishing: Oxford), 2014, p. 1-6.
  10. Leach R, Chapter 1 – Optical Measurement of Surface Topography, electronic resource, (Springer-Verlag Berlin Heidelberg), 2011, pp 1-14.
  11. Amra C, Torricini D, Roche P, Multiwavelength (0.45–10.6 μm) angle-resolved scatterometer or how to extend the optical window, Appl Opt, 32(1993)5462–5474.
  12. Roche P, Pelletier E, Characterizations of optical surfaces by measurement of scattering distribution, Appl Opt, 23 (1984)3561–3566.
  13. Watkins S E, Black J P, Pond B J, Optical scatter characteristics of high-reflectance dielectric coatings and fused-silica substrates, Appl Opt, 32(1993)5511–5518.
  14. Kienzle O, Staub J, Tschudi T, Light scattering from transparent substrates: theory and experiment, Phys Rev B, 50(1994)1848–1860.
  15. Gliech S, Steinert J, Duparré A Light-scattering measurements of optical thin-film components at 157 and 193 nm. Appl Opt, 41(2002)3224–3235.
  16. Lequime M, Zerrad M, Deumié C, Amra C, A goniometric light scattering instrument with high-resolution imaging, Opt Commun, 282(2009)1265–1273.
  17. Hou H, Yi K, Shang S, Shao J, Fan Z, Measurements of light scattering from glass substrates by total integrated scattering, App Opt, 44(2005)6163–6166.
  18. Tay C J, Wang S H, Quan C, Ng B L, Chan K C, Surface roughness investigation of semi-conductor wafers, Opt Laser Technol, 36(2004)535–539.
  19. Mazule L, Liukaityte S, Eckardt R C, Melninkaitis A, Balachninaite O, Sirutkaitis V, A system for measuring surface roughness by total integrated scattering, J Phys D: Appl Phys, 44(2011)505103; doi.10.1088/0022-3727/44/50/505103.
  20. Jakobs S, Duparre A, Truckenbrodt H, AFM and light scattering measurements of optical thin films for applications in the UV spectral region, Int J Mach Tools Manuf, 38(1998)733–739.
  21. Amra C, Grezes-Besset C, Roche P, Pelletier E, Description of a scattering apparatus: application to the problems of characterization of opaque surfaces, Appl Opt, 28(1989)2723–730.
  22. Schröder S, Gliech S, Duparré A, Measurement system to determine the total and angle-resolved light scattering of optical components in the deep-ultraviolet and vacuum-ultraviolet spectral regions, Appl Opt, 44(2005)6093–6107.
  23. Elson J M, Rahn J P, Bennett J M, Relationship of the total integrated scattering from multilayer-coated optics to angle of incidence, polarization, correlation length, and roughness cross-correlation properties, Appl Opt, 22 (1983)3207–3219.
  24. Stover J C, Optical scattering. Measurement and analysis, (SPIE Press Volume), 1995, p. 85-109.
  25. Briers J D, Surface roughness evaluation. In: Speckle metrology, (CRC Press), 2020, p. 373-426.
  26. Fujii H, Asakura T, Roughness measurements of metal surfaces using laser speckle, J Opt Soc Am, 67(1977)1171–1176.
  27. Goodman J W, Some fundamental properties of speckle, J Opt Soc Am, 66(1976)1145–1150.
  28. Salazar F, Barrientos A, Surface roughness measurement on a wing aircraft by speckle correlation, Sensors, 13 (2013)11772–11781.
  29. Toh S L, Shang H M, Tay C J, Surface-roughness study using laser speckle method, Opt Lasers Eng, 29(1998)217–225.
  30. Briers J D, Chapter 3- Surface roughness evaluation, In: Speckle Metrology, Sirohi R S, (Marcel Dekker. New York), 1993, p. 373-418.
  31. Erf R, Speckle metrology, (New York: Academic Press), 1978, p. 11-49.
  32. Burch J M, Laser speckle metrology. In: Developments in Holography II, International Society for Optics and Photonics, 1971, p. 149-156.
  33. Corrêa R D, Meireles J B, Huguenin J A O, Caetano D P, Da Silva L, Fractal structure of digital speckle patterns produced by rough surfaces, Phys A: Stat Mech Appl, 392(2013)869–874.
  34. Dhanasekar B, Mohan N K, Bhaduri B, Ramamoorthy B, Evaluation of surface roughness based on monochromatic speckle correlation using image processing, Precis Eng, 32(2008)196–206.
  35. Ettl P, Schmidt B E, Schenk M, Laszlo I, Haeusler G, Roughness parameters and surface deformation measured by coherence radar, In: International Conference on Applied Optical Metrology, 3407(1998)133–140.
  36. Hamed A M, El-Ghandoor H, El-Diasty F, Saudy M, Analysis of speckle images to assess surface roughness, Opt Laser Technol, 36(2004)249–253.
  37. Persson U, Surface roughness measurement on machined surfaces using angular speckle correlation, J Mater Process Technol, 180(2006)233–238.
  38. Matham M V, Seng O L, Asundi A, Polarization phase shifting shearography for optical metrological applications, Opt Laser Techno, 30(1998)527–531.
  39. Matham M V, Narayanan Unni S, Digital speckle pattern interferometry for deformation analysis of inner surfaces of cylindrical specimens, Appl Opt, 43(2004)2400–2408.
  40. Goodman J W, Dependence of image speckle contrast on surface roughness, Opt Commun, 14(1975)324–327.
  41. Persson U, Real time measurement of surface roughness on ground surfaces using speckle-contrast technique, Opt Lasers Eng, 17(1992)61–67.
  42. Leonard L C, Toal V, Roughness measurement of metallic surfaces based on the laser speckle contrast method, Opt Lasers Eng, 30(1998)433–440.
  43. Persson U, Measurement of surface roughness on rough machined surfaces using spectral speckle correlation and image analysis, Wear, 160(1993)221–225.
  44. Léger D, Mathieu E, Perrin J C, Optical surface roughness determination using speckle correlation technique, Appl Opt, 14(1975)872–877.
  45. Spagnolo G S, Paoletti D, Paoletti A, Ambrosini D, Roughness measurement by electronic speckle correlation and mechanical profilometry, Measurement, 20(1997)243–249.
  46. Toh S L, Quan C, Woo K C, Tay C J, Shang H M, Whole field surface roughness measurement by laser speckle correlation technique, Opt Laser Techno, 33(2001)427–434.
  47. Ruffing B, Application of speckle-correlation methods to surface-roughness measurement: a theoretical study, J Opt Soc Am A, 3(1986)1297–1304.
  48. Ruffing B, Fleischer J, Spectral correlation of partially or fully developed speckle patterns generated by rough surfaces, J Opt Soc Am A, 2(1985)1637–1643.
  49. Spagnolo G S, Cozzella L, Leccese F, Viability of an optoelectronic system for real time roughness measurement, Measurement, 58(2014)537–543.
  50. Schreiber H, Bruning J H, Phase shifting interferometry, Optical shop testing, (Wiley Interscience, Hoboken, NJ), Ch 14, (2007), pp 547–666.
  51. Neuschaefer-Rube U, Neugebauer M, Ehrig W, Bartscher M, Hilpert U, Tactile and optical microsensors: test procedures and standards, Meas Sci Technol, 19(2008)084010;
  52. Vargas J, Quiroga J A, Belenguer T, Phase-shifting interferometry based on principal component analysis, Opt Lett, 36(2011)1326–1328.
  53. O’Mahony C, Hill M, Brunet M, Duane R, Mathewson A, Characterization of micromechanical structures using white-light interferometry, Meas Sci Technol, 14(2003)1807; doi.10.1088/0957-0233/14/10/310.
  54. Lee B S, Strand T C, Profilometry with a coherence scanning microscope, Appl Opt, 29(1990)3784–3788.
  55. Kaplonek W, Lukianowicz C, Coherence correlation interferometry in surface topography measurements, Recent Interferometry Applications in Topography and Astronomy, Intech Open, (2012)1-26.
  56. Lee-Bennett, Advances in non-contacting surface metrology, In: Optical Fabrication and Testing, Optical Society of America, (2004), p OTuC1; doi. 10.1364/OFT.2004.OTuC1.
  57. De Nicola S, Ferraro P, Grilli S, Miccio L, Meucci R, Buah-Bassuah P. K, Arecchi F. T, Infrared digital reflective-holographic 3D shape measurements, Opt commun, 281(2008)1445–1449.
  58. Pedrini G, Zhang F, Osten W, Digital holographic microscopy in the deep (193 nm) ultraviolet, Appl Opt, 46 (2007)7829–7835.
  59. Kim M K, Principles and techniques of digital holographic microscopy, SPIE Rev, 1(2010)018005; doi. 10.1117/6.0000006.
  60. Kühn J, Charrière F, Colomb T, Cuche E, Montfort F, Emery Y, Depeursinge C, Axial sub-nanometer accuracy in digital holographic microscopy, Meas Sci Technol, 19(2008)074007; doi. 10.1088/0957-0233/19/7/074007.
  61. Kühn J, Colomb T, Montfort F, Charrière F, Emery Y, Cuche E, Marquet P, Depeursinge C, Real-time dual-wavelength digital holographic microscopy with a single hologram acquisition, Opt Express, 15(2007)7231–7242.
  62. Ritter R, Hahn R, Contribution to analysis of the reflection grating method, Opt Lasers Eng, 4(1983)13–24.
  63. Knauer M C, Kaminski J, Hausler G, Phase measuring deflectometry: a new approach to measure specular free-form surfaces, In Optical Metrology in Production Engineering, International Society for Optics and Photonics, (2004), p. 366-376.
  64. Bothe T, Li W, von Kopylow C, Juptner W P, High-resolution 3D shape measurement on specular surfaces by fringe reflection, In Optical Metrology in Production Engineering, International Society for Optics and Photonics, (2004), p. 411-422.
  65. Höfer S, Burke J, Heizmann M, Infrared deflectometry for the inspection of diffusely specular surfaces, Adv Opt Technol, 5(2016)377–387.
  66. Butel G P, Smith G A, Burge J H, Deflectometry using portable devices, Opt Eng, 54(2015)025111;doi. 10.1117/1.OE.54.2.025111.
  67. Häusler G, Richter C, Leitz K H, Knauer M C, Microdeflectometry—a novel tool to acquire three-dimensional microtopography with nanometer height resolution, Opt Lett, 33(2008)396–398.
  68. Haeusler G, U.S. Patent No. 8,224,066. Washington, DC: U.S. Patent and Trademark Office, 2012.
  69. Häusler G, Vogel M, Yang Z, Kessel A, Faber C, Kranitzky C, Microdeflectometry and structural illumination microscopy–new tools for 3D-metrology at nanometer scale. In Proc Precision Interferometric Metrology, ASPE 2010 Summer Topical Meeting, Asheville, North Carolina, USA, (2010), p. 46-51.
  70. Dorsch R G, Häusler G, Herrmann J M, Laser triangulation: fundamental uncertainty in distance measurement, Appl Opt, 33(1994)1306–1314.
  71. Dresel T, Häusler G, Venzke H, Three-dimensional sensing of rough surfaces by coherence radar, Appl Opt, 31 (1992)919–925.
  72. Häusler G, Ettl S, Limitations of optical 3D sensors. In Optical measurement of surface topography, (Springer, Berlin, Heidelberg), 2011, pp 23-48.
  73. Danzl R, Helmli F, Form measurement of engineering parts using an optical measurement system based on focus variation, In 7th European Society for Precision Engineering and Nanotechnology International Conference, (2007)
  74. Danzl R, Helmli F, Scherer, S,Focus variation–a new technology for high resolution optical 3D surface metrology, In The 10th international conference of the slovenian society for non-destructive testing, (2009), p. 484-491.
  75. Minsky M, Memoir on inventing the confocal scanning microscope, Scanning, 10(1988)128–138.
  76. Leach R K , Fundamental principles of engineering nanometrology. [electronic resource]. Micro and nano technologies, (Oxford : William Andrew ; Amsterdam : Elsevier Science), 2010, pp 263–288.
  77. Jordan H J, Wegner M, Tiziani H, Highly accurate non-contact characterization of engineering surfaces using confocal microscopy, Meas Sci Technol, 9(1998)1142; doi. 10.1088/0957-0233/9/7/023.
  78. Hamilton D K, Wilson T, Three-dimensional surface measurement using the confocal scanning microscope, Appl Phys B, 27(1982)211–213.
  79. Wilson T, Resolution and optical sectioning in the confocal microscope, J Microsc, 244(2011)113–121.
  80. Carlsson K, Åslund N, Confocal imaging for 3-D digital microscopy, Appl Opt, 26(1987)3232–3238.
  81. Hamilton D K, Wilson T, Three-dimensional surface measurement using the confocal scanning microscope, Appl Phys B, 27(1982)211–213.
  82. Zhang Y, Strube S, Molnar G, Danzebrink H U, Dai G, Bosse H, Hou W, Parallel large-range scanning confocal microscope based on a digital micromirror device, Optik, 124(2013)1585–1588.
  83. Petráň M, Hadravský M, Boyde A, The tandem scanning reflected light microscope, Scanning, 7(1985)97–108.
  84. Martial F P, Hartell N A, Programmable Illumination and High-Speed, Multi-Wavelength, Confocal Microscopy Using a Digital Micromirror, PLoS ONE, 7(2012) e43942;
  85. Engelhardt K, Häusler G, Acquisition of 3-D data by focus sensing, Appl Opt, 27(1988)4684–4689.
  86. Wilson T, Neil M A A, Juskaitis, R, U.S. Patent No. 6,376,818. Washington, DC: U.S. Patent and Trademark Office, 2002.
  87. Gustafsson M G, Shao L, Carlton P M, Wang C R, Golubovskaya I N, Cande W Z, Sedat J W, Three-dimensional resolution doubling in wide-field fluorescence microscopy by structured illumination, Biophys J, 94 (2008)4957–4970.
  88. Gustafsson M G, Nonlinear structured-illumination microscopy: wide-field fluorescence imaging with theoretically unlimited resolution, Proceedings of the National Academy of Sciences,(USA),102(2005)13081–13086.
  89. Gustafsson M G, Surpassing the lateral resolution limit by a factor of two using structured illumination microscopy, J Microsc, 198(2000)82–87.
  90. Heintzmann R, Structured illumination methods. In: Handbook of biological confocal microscopy, (Springer, Boston, MA), 2006, pp. 265-279
  91. Dan D, Yao B, Lei M, Structured illumination microscopy for super-resolution and optical sectioning, Sci Bull, 59(2014)1291–1307.
  92. Heintzmann R, Huser T, Super-resolution structured illumination microscopy, Chem Rev, 117(2017)13890–13908.
  93. Häusler G, Vogel M, Yang Z, Kessel A, Faber C, SIM and deflectometry: new tools to acquire beautiful, SEM-like 3D images. In Imaging Systems and Applications, Optical Society of America, (2011), p. JWC1.
  94. Vogel M, Kessel A, Yang Z, Faber C, Seraphim M C, Häusler G, Tuning structured illumination microscopy (SIM) for the inspection of micro optical components. In Proc DGaO, (2010), p A22.
  95. Vogel M, Yang Z, Kessel A, Kranitzky C, Faber C, Häusler G, Structured-illumination microscopy on technical surfaces: 3D metrology with nanometer sensitivity, In Optical Measurement Systems for Industrial Inspection VII, International Society for Optics and Photonics, (2011), p. 80820S.
  96. Kranitzky C, Richter C, Faber C, Knauer M C, Häusler G, 3D-microscopy with large depth of field. In DGaO Proceedings, (2009), p A12.
  97. Yang Z, Bielke A, Häusler G, Better three-dimensional inspection with structured illumination: speed, Appl Opt, 55(2016)1713–1719.
  98. Yang Z, Kessel A, Häusler G, Better 3D inspection with structured illumination: signal formation and precision, Appl Opt, 54(2015)6652–6660.
  99. Saxena M, Eluru G, Gorthi S S, Structured illumination microscopy, Adv Opt Photonics, 7(2015)241–275.
  100. Xu J J, Lee K K, 3-d optical microscope. U.S. Patent No.20100135573A1, Washington, DC: U.S. Patent and Trademark Office, 2010.
  101. Flusberg B A, Cocker E D, Piyawattanametha W, Jung J C, Cheung E L, Schnitzer M J, Fiber-optic fluorescence imaging, Nat Methods, 2(2005)941–950.
  102. Yamazaki K, U.S. Patent No. 5,757,496. Washington, DC, U.S. Patent and Trademark Office, 1998.
  103. Xu X, Liu S, Hu H, A new fiber optic sensor for inner surface roughness measurement, In 2009 International Conference on Optical Instruments and Technology: Advanced Sensor Technologies and Applications, International Society for Optics and Photonics, (2009), p. 75080J.
  104. Smith M D, Fibre interferometry for differential measurements, Doctoral dissertation, Engineering and Physical Sciences, Heriot-Watt University, Edinburgh, Scotland, 2015.
  105. Steelman Z A, Kim S, Jelly E T, Crose M, Chu K K, Wax A, Comparison of imaging fiber bundles for coherence-domain imaging, Appl Opt, 57(2018)1455–1462.
  106. Xie T, Mukai D, Guo S, Brenner M, Chen Z, Fiber-optic-bundle-based optical coherence tomography, Opt Lett, 30(2005)1803–1805.
  107. Gmitro A F, Aziz D, Confocal microscopy through a fiber-optic imaging bundle, Opt Lett, 18(1993)565–567.
  108. Kobayashi T, Shan X C, Murakoshi Y, Maeda R, A novel self-sensitive SFM for nondestructive measurement of tiny vertical surfaces with restricted access, In Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003, IEEE, (2003), p. 286-289.
  109. Prabhathan P, Song C, Haridas A, Prasad G, Chan K, Intensity and contrast based surface roughness measurement approaches for rough and shiny surfaces, In Fifth International Conference on Optical and Photonics Engineering, International Society for Optics and Photonics, (2017), p. 1044912.
  110. Dev K, Prasad G, Haridas A, Prabhathan P, Chan K H, Matham M V, Surface roughness measurement of additive manufactured samples using angular speckle correlation, In Fifth International Conference on Optical and Photonics Engineering, International Society for Optics and Photonics, (2017), p. 104492W.
  111. Prabhathan P, Song C, Haridas A, Prasad G, Chan K, Murukeshan V M, Experimental investigations and parametric studies of surface roughness measurements using spectrally correlated speckle images, In Fifth International Conference on Optical and Photonics Engineering, International Society for Optics and Photonics, (2017), p. 1044913.
  112. Haridas A, Prabhathan P, Pulkit K, Chan K, Murukeshan V M, Surface roughness mapping of large area curved aerospace components through spectral correlation of speckle images, Appl Opt, 59(2020)5041–5051.
  113. Matham M, Prabhathan P, Haridas A, Kapur P, Bilal NM; Chan KHK, Non-contact surface roughness map display on large area curved samples, European Patent Application No. 19216655.1, EP3680607A1, Date filed: 08 Jan 2019.
  114. Haridas A, Crivoi A, Patinharekandy P, Chan K, Murukeshan V M, Fractal speckle image analysis for surface characterization of aerospace structures. In Fifth International Conference on Optical and Photonics Engineering, International Society for Optics and Photonics (2017), p. 104491T
  115. Haridas A, Crivoi A, Patinharekandy P, Chan K, Murukeshan V M, A fractal image analysis methodology for heat damage inspection in carbon fiber reinforced composites, In Fifth International Conference on Optical and Photonics Engineering, International Society for Optics and Photonics (2017), p. 104491L
  116. Matham M, Haridas A, Crivoi A, Prabhathan P, Determining Surface Roughness, , UK Patent Application No. GBGB1705406.5A, Date filed: 04 Apr 2017.
  117. Perinchery S M, Haridas A, Shinde A, Buchnev O, Murukeshan V M, Breaking diffraction limit of far-field imaging via structured illumination Bessel beam microscope (SIBM), Opt Express, 27(2019)6068–6082.
  118. Haridas A, Perinchery S M, Shinde A, Buchnev O, Murukeshan V M, Long working distance high resolution reflective sample imaging via structured embedded speckle illumination, Opt Lasers Eng, 134(2020)106296; doi. 10.1016/j.optlaseng.2020.106296.
  119. Haridas A, Matham M, Enhancing the limits of optical sectioning in far field reflection microscopy , Opt Lasers Eng,(Submitted), 2021.
  120. Subbarao G P A, Haridas A, Patinharekandy P, Kapur P, Chan K, Flexible optical fiber probe for surface roughness evaluation of internal channels in additively manufactured components, Proceedings of the 3rd International Conference on Progress in Additive Manufacturing, Pro-AM (2018), p. 601-606. https://doi:10.25341/D4NK5F
  121. Matham M, Chan K, Subbarao GPA, Prabhathan P, Haridas A, Kapur P, Measuring surface roughness, UK Patent Application No. 1718699.0, GB201718699D0, United Kingdom, Date filed: 13 Nov 20171718699.0; 27 Nov 2017.
  122. Haridas A., Matham M V, Crivoi A, Patinharekandy P, Jen T M, Chan K, Surface roughness evaluation of additive manufactured metallic components from white light images captured using a flexible fiberscope, Opt Lasers Eng, 110(2018)262–271.