Asian Journal of Physics Vol 32, Nos 5 – 8 (2023) 237-242

Modeling of images of patterned dielectric layers on a substrate: A review

Colin J R Sheppard
1Nanoscopy and NIC@IIT, Istituto Italiano di Tecnologia, Via Enrico Melen, 83 Edificio B, 16152 Genova, Italy
2Molecular Horizons, School of Chemistry & Molecular Biosciences, University of Wollongong, Wollongong, NSW 2522, Australia

We review modeling of image formation in the reflection geometry of dielectric structures. Early work on applying rigorous scattering theory to image modeling was reported by John Sheridan, in his doctoral thesis. He also investigated approximate methods for scattering calculations. More recent developments in approximate methods based on Born or Kirchhoff approximations are also reviewed. These can be applied to image modeling and reconstruction in partially coherent, confocal or interferometric systems, including low-coherence interference microscopes. © Anita Publications. All rights reserved.
Keywords: Gratings, Diffraction, Scattering, Image formation, Metrology.

Peer Review Information
Method: Single- anonymous; Screened for Plagiarism? Yes
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