Simulation of high frequency short pulse excitation of co-axial xenon excimer source for generation of 172 nm radiation

Navin K Sharma¹, Y Choyal¹, Udit Narayan Pal² and Ram Prakash Lamba^2
1School of Physics, Devi Ahilya Vishwavidyalaya, Indore-452 001, India
²CSIR-Central Electronics Engineering Research Institute, Pilani-333 031, India
Dedicated to Prof B N Basu

In this work, simulation study of dielectric barrier discharge-based xenon excimer source of co-axial geometry radiating at 172 nm is carried out. The discharge is ignited in the 4 mm gas gap between the metallic electrode and the dielectric covered grounded electrode. The spatio-temporal characteristics of the source has been investigated for the pulsed voltage of amplitude 5 kV repeated with the frequency of 25 kHz. The investigation has been done for two cases of gas pressure, 100 mbar and 150 mbar, in order to achieve higher concentration of Xe2 excimer. It has been found that the concentration of the xenon excimer is higher for the gas pressure of 150 mbar which is near to the cathode. © Anita Publications. All rights reserved.
Keywords: Dielectric barrier discharge (DBD), Excimer, Conversion efficiency, Simulation.

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