Asian Journal of Physics Vol. 30 Nos 10 & 11 (2021) 1527-1546

Tilt measurement using interferometry – An overview
A R Ganesan and V C Pretheesh Kumar


Optical techniques are the most sensitive tools for the precise measurement of angles and tilts. These techniques can be broadly categorized into non-interferometric and interferometric techniques. This paper summarizes various interferometric techniques for precision measurement of tilt. Most of the reported interferometric techniques use Michelson configuration, wherein fringe stability is a major issue. Novel methods based on the use of a cyclic interferometer with high stability and enhanced sensitivity are presented. © Anita Publications. All rights reserved
Keywords: Tilt measurement, Interferometry, Cyclic interferometer, Polarization phase shifting.

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Method: Single- anonymous; Screened for Plagiarism? Yes
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