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Asian Journal of Physics Vol. 30 Nos 10 & 11 (2021) 1527-1546

Tilt measurement using interferometry – An overview
A R Ganesan and V C Pretheesh Kumar

Abstract

Optical techniques are the most sensitive tools for the precise measurement of angles and tilts. These techniques can be broadly categorized into non-interferometric and interferometric techniques. This paper summarizes various interferometric techniques for precision measurement of tilt. Most of the reported interferometric techniques use Michelson configuration, wherein fringe stability is a major issue. Novel methods based on the use of a cyclic interferometer with high stability and enhanced sensitivity are presented. © Anita Publications. All rights reserved
Keywords: Tilt measurement, Interferometry, Cyclic interferometer, Polarization phase shifting.

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Method: Single- anonymous; Screened for Plagiarism? Yes
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References

  1. Perryman M A C, GAIA: An astrometric and photometric survey of our galaxy. Astrophys Space Sci. 280(2002)1-10. doi:10.1023/A:1015584404846.
  2. Lamoreaux S K. Demonstration of the Casimir force in the 0.6 to 6 µm range, Phys Rev Lett, 78(1997)5–8.
  3. Wiesendanger R, Scanning Probe Microscopy and Spectroscopy, (Cambridge Univ Press), 1994.
  4. Bergamin A, Cavagnero G, Mana G. A displacement and angle interferometer with subatomic resolution, Rev Sci, 64(1993)3076–3081.
  5. Quinn T J, Speake C C, Davis R S. Novel torsion balance for the measurement of the Newtonian gravitational constant, Metrologia, 34(1997)245–249.
  6. Fitzgerald M P, Armstrong T R, Hurst R B, Corney A C. A method to measure Newton’s gravitational constant, Metrologia, 31(1994)301; doi.org/10.1088/0026-1394/31/4/003.
  7. Rank D H, High precision achromatic autocollimator, Review of Scientific Instruments, 17(1946)243; doi.org/10.1063/1.1770477.
  8. Yoder P R, Schlesinger E R, Chickvary J L. Active annular-beam laser autocollimator system, Appl Opt, 14(1975) 1890–1895.
  9. Schuda F J. High-precision, wide-range, dual-axis, angle monitoring system, Rev Sci Instrum, 54(1983)1648–1652.
  10. Hariharan P, Basics of Interferometry, (Elsevier Inc, edn), 2007.
  11. Michelson A A, Morley E W, On the relative motion of the earth and luminiferous ether, Am J Sci, 34(1887) 333–345.
  12. Sagnac G. The demonstration of the luminiferous aether by an interferometer in uniform rotation, Comptes Rendus, 157(1913)708–710.
  13. Peck E R. Theory of the corner-cube Interferometer, J Opt Soc Am, 38(1948)1015–1024.
  14. Murty M V R K. Some more aspects of the Michelson interferometer with cube corners, J Opt Soc Am, 50(1960)7; doi:10.1364/JOSA.50.000007.
  15. Murty M V R K. Modification of Michelson interferometer using only one cube-corner prism, J Opt Soc Am, 50(1960)83–84.
  16. Chapman G D. Interferometric angular measurement, Appl Opt, 13(1974)1646–1651.
  17. Malacara D, Harris O. Interferometric measurement of angles, Appl Opt, 9(1970)1630–1633.
  18. Chiu M-H, Wang S-F, Chang R-S, Instrument for measuring small angles by use of multiple total internal reflections in heterodyne interferometry, Appl Opt, 43(2004)5438–5442.
  19. Lin S-T, Yeh S-L, Lin Z-F. Angular probe based on using Fabry-Perot etalon and scanning technique, Opt Express, 18(2010)1794–1800.
  20. Pavan Kumar Y, Chatterjee S, Negi S S, Small roll angle measurement using lateral shearing cyclic path polarization interferometry, Appl Opt, 55(2016)979–983.
  21. Joenathan C, Bernal A, Woonghee Y, Bunch R M, Hakoda C. Dual-arm multiple-reflection Michelson interferometer for large multiple reflections and increased sensitivity, Opt Eng, 55(2016); doi:10.1117/1.OE.55.2.024101.
  22. Pisani M, Astrua M, Angle amplification for nanoradian measurements, Appl Opt, 45(2006)1725–1729.
  23. Pretheesh Kumar V C, Joenathan C, Ganesan A, Somasundram U, Increasing the sensitivity for tilt measurement using a cyclic interferometer with multiple reflections, Opt Eng, 55(2016)084103, doi: 10.1117/1.OE.55.8.084103.
  24. Kothiyal M P, Delisle C. Shearing interferometer for phase shifting interferometry with polarization phase shifter. Appl Opt, 24(1985)4439–4442.
  25. Pretheesh Kumar V C, Ganesan A R, Nano scale tilt measurement using a polarizing phase shifting cyclic interferometer, Opt Laser Technol, 120(2019)105691; doi.org/10.1016/j.optlastec.2019.105691.
  26. Schwider J, Burow R, Elssner K-E, Grzanna J, Spolaczyk R, Merkel K. Digital wave-front measuring interferometry: some systematic error sources, Appl Opt, 22(1983)3421–3432.
  27. Hariharan P, Oreb B F, Eiju T. Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm, Appl Opt, 26(1987)2504–2508.

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