Modeling of images of patterned dielectric layers on a substrate: A review

Colin J R Sheppard
¹Nanoscopy and NIC@IIT, Istituto Italiano di Tecnologia, Via Enrico Melen, 83 Edificio B, 16152 Genova, Italy
²Molecular Horizons, School of Chemistry & Molecular Biosciences, University of Wollongong, Wollongong, NSW 2522, Australia

We review modeling of image formation in the reflection geometry of dielectric structures. Early work on applying rigorous scattering theory to image modeling was reported by John Sheridan, in his doctoral thesis. He also investigated approximate methods for scattering calculations. More recent developments in approximate methods based on Born or Kirchhoff approximations are also reviewed. These can be applied to image modeling and reconstruction in partially coherent, confocal or interferometric systems, including low-coherence interference microscopes. © Anita Publications. All rights reserved.
Keywords: Gratings, Diffraction, Scattering, Image formation, Metrology.

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Method: Single- anonymous; Screened for Plagiarism? Yes
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